设计ICCreatech半导体晶圆记帐和探头测量自动化软件

D. Argunov, B. Shiryaev, A. Bezruk, A. Yushenko
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引用次数: 0

摘要

不同制造过程的自动化和建立现代化的数字文件传输系统是提高工厂绩效的一个重要问题。本文介绍了单片集成电路制造自动化信息系统的开发成果。已经开发了服务器和客户端解决方案,支持电子覆盖文档的功能,进行自动化晶圆上电气特性测量和测量数据分析。
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Design ICCreatech semiconductor wafer accounting and probe measurement automatization software
The different manufacturing processes automatization and creating a modern digital document transferring system is an important problem for enhancing factory performance. This paper presents the results of developing an automated information system for manufacturing monolithic integrated circuits. Server and client solutions have been developed supported features of electronic covering documents, making automated on-wafer electrical characteristics measurement, and measurement data analysis.
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