能同时测量压力和pH值的多模态图像传感器的制造

2022 IEEE Sensors Pub Date : 2022-10-30 DOI:10.1109/SENSORS52175.2022.9967109

Mizuki Odaira, Yukihiro Tatsumi, Kensuke Murakami, Ken Ogasahara, Satoshi Shimizu, Yong-Joon Choi, Kazuhiro Takahashi, T. Noda, K. Sawada

{"title":"能同时测量压力和pH值的多模态图像传感器的制造","authors":"Mizuki Odaira, Yukihiro Tatsumi, Kensuke Murakami, Ken Ogasahara, Satoshi Shimizu, Yong-Joon Choi, Kazuhiro Takahashi, T. Noda, K. Sawada","doi":"10.1109/SENSORS52175.2022.9967109","DOIUrl":null,"url":null,"abstract":"In this study, we propose a pressure-ion image sensor that can simultaneously measure pressure and ion distribution with a patterned piezoelectric film on a pH image sensor. By patterning using photolithography and lift-off, a structure with alternating pressure and pH sensing areas was achieved, and the fabricated pressure-ion image sensor successfully visualized pH and pressure distribution simultaneously.","PeriodicalId":120357,"journal":{"name":"2022 IEEE Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of Multimodal Image Sensor Capable of Simultaneous Measurement of Pressure and pH\",\"authors\":\"Mizuki Odaira, Yukihiro Tatsumi, Kensuke Murakami, Ken Ogasahara, Satoshi Shimizu, Yong-Joon Choi, Kazuhiro Takahashi, T. Noda, K. Sawada\",\"doi\":\"10.1109/SENSORS52175.2022.9967109\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, we propose a pressure-ion image sensor that can simultaneously measure pressure and ion distribution with a patterned piezoelectric film on a pH image sensor. By patterning using photolithography and lift-off, a structure with alternating pressure and pH sensing areas was achieved, and the fabricated pressure-ion image sensor successfully visualized pH and pressure distribution simultaneously.\",\"PeriodicalId\":120357,\"journal\":{\"name\":\"2022 IEEE Sensors\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSORS52175.2022.9967109\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSORS52175.2022.9967109","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

在这项研究中，我们提出了一种压力离子图像传感器，它可以同时测量pH图像传感器上的压力和离子分布。通过光刻和发射技术，实现了压力和pH感测区交替的结构，并成功地实现了pH和压力分布的同时可视化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

Fabrication of Multimodal Image Sensor Capable of Simultaneous Measurement of Pressure and pH

In this study, we propose a pressure-ion image sensor that can simultaneously measure pressure and ion distribution with a patterned piezoelectric film on a pH image sensor. By patterning using photolithography and lift-off, a structure with alternating pressure and pH sensing areas was achieved, and the fabricated pressure-ion image sensor successfully visualized pH and pressure distribution simultaneously.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2022 IEEE Sensors

自引率

0.00%

发文量