{"title":"等离子体离心机作为一种紧凑、低成本、稳定同位素分离器的研究","authors":"N. Qi, P. Greene, R. Prasad, M. Krishnan","doi":"10.1109/PLASMA.1994.588758","DOIUrl":null,"url":null,"abstract":"A plasma-CVD reactor with parallel plate electrodes has been used to produce TLN coatings on three-dimensional substrates of simple geometry, using a mixture of Ha. N2 and Tic14 as reactive gases. The chemical and mechanical properties of the coatings have been determined as a function of selected parameters of the deposition process. The general characteristics of the plasma reactor and the obtained results are discussed. Krypton-fluoride laser ablation experiments have been performed on A I 2 0 3 (alumina) to investigate","PeriodicalId":254741,"journal":{"name":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study Of The Plasma Centrifuge As A Compact, Low Cost, Stable Isotope Separator\",\"authors\":\"N. Qi, P. Greene, R. Prasad, M. Krishnan\",\"doi\":\"10.1109/PLASMA.1994.588758\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A plasma-CVD reactor with parallel plate electrodes has been used to produce TLN coatings on three-dimensional substrates of simple geometry, using a mixture of Ha. N2 and Tic14 as reactive gases. The chemical and mechanical properties of the coatings have been determined as a function of selected parameters of the deposition process. The general characteristics of the plasma reactor and the obtained results are discussed. Krypton-fluoride laser ablation experiments have been performed on A I 2 0 3 (alumina) to investigate\",\"PeriodicalId\":254741,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLASMA.1994.588758\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.1994.588758","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study Of The Plasma Centrifuge As A Compact, Low Cost, Stable Isotope Separator
A plasma-CVD reactor with parallel plate electrodes has been used to produce TLN coatings on three-dimensional substrates of simple geometry, using a mixture of Ha. N2 and Tic14 as reactive gases. The chemical and mechanical properties of the coatings have been determined as a function of selected parameters of the deposition process. The general characteristics of the plasma reactor and the obtained results are discussed. Krypton-fluoride laser ablation experiments have been performed on A I 2 0 3 (alumina) to investigate
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