{"title":"微光刻和衍射光学中的信号合成技术","authors":"B. Saleh","doi":"10.1364/srs.1998.swb.1","DOIUrl":null,"url":null,"abstract":"This paper is an overview of mathematical techniques for finding images whose transforms satisfy equality and/or inequality constraints. Applications include microlithography, diffractive optics, and holography.","PeriodicalId":184407,"journal":{"name":"Signal Recovery and Synthesis","volume":"179 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Techniques for Signal Synthesis in Microlithography and Diffractive Optics\",\"authors\":\"B. Saleh\",\"doi\":\"10.1364/srs.1998.swb.1\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper is an overview of mathematical techniques for finding images whose transforms satisfy equality and/or inequality constraints. Applications include microlithography, diffractive optics, and holography.\",\"PeriodicalId\":184407,\"journal\":{\"name\":\"Signal Recovery and Synthesis\",\"volume\":\"179 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Signal Recovery and Synthesis\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/srs.1998.swb.1\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Signal Recovery and Synthesis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/srs.1998.swb.1","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Techniques for Signal Synthesis in Microlithography and Diffractive Optics
This paper is an overview of mathematical techniques for finding images whose transforms satisfy equality and/or inequality constraints. Applications include microlithography, diffractive optics, and holography.
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