A. Muller, G. Konstantinidis, D. Neculoiu, D. Vasilache, Z. Hazopulos, A. Pantazis, A. Stavrinidis, C. Buiculescu, I. Petrini
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Novel micromachined GaAs circuits for millimeter wave applications
This paper discusses novel micromachined GaAs circuits for millimeter wave applications. A low loss line filter structure for 45 GHz, a Yagi-Uda antenna for 45 GHz and a micromachined receiver with Yagi-Uda antenna are primarily presented. The manufacturing of membrane supported filters, antenna and receiver structures have confirmed the capabilities of GaAs micromachining in manufacturing of high performance circuits for millimeter wave communication systems.
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