Modelling and simulation of fractal cantilever's MEMS based for mass sensing applications

Miniaturized sensor's exhibit fast responses with minimal sample volume and feasibility of mass production. The Micro-cantilever based sensor detection scheme has been proved as a potential technology for sensing chemical and biological agents with high sensitivity and selectivity. The geometrical variation and dimensional scalability are the major adaptation techniques in order to achieve the trade off between sensitivity and selectivity. In order to achieve high sensitivity, scaling the dimensions down further makes fabrication and immobilisation a complex process. This paper proposes the incorporation of fractal geometry for a micro-cantilever for mass sensing applications at pico gram level of particles and concentrated on level one of fractal's. The dimensions of the cantilever are around 200∗20 micron (um) with level one fractal structure having a scaling factor of n=0.9 and with a gradient of 30 degrees with horizontal plane. The modelling and simulation of this geometry showed a promising result in increasing sensitivity with an added mass of gold particle of 1um∗ 1um∗ 1um at the tip of the cantilever and increase in surface area in this structures results in more selectivity.