基于PVD技术的薄膜储能器件的物理化学方法

R. Velmurugan, B. Subramanian
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引用次数: 2

摘要

对于薄膜的制备,物理气相沉积(PVD)技术比其他沉积技术贡献更大。激光烧蚀或脉冲激光沉积(PLD)技术是所有物理气相沉积技术中最有前途的薄膜制造技术之一。特别是柔性薄膜储能制造,由于其特殊的参数,如精细的厚度控制、分压大气条件、脉冲重复率、原位退火和微观结构优化,在PLD中起着重要的作用。最近,薄膜超级电容电池得到了广泛的研究,其中电池和基于超级电容的电极相结合,以获得高比功率和比能量密度以及延长循环稳定性。为了制造薄膜超级电容电池,需要具有大电位窗口、高电容和容量性能的电极。因此,本章代表了经济和环保的薄型柔性超级电池增长的重要增强,并证实了它们在运输电子设备和其他小工具等敏感应用中的潜力。
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Physicochemical Approaches for Thin Film Energy Storage Devices through PVD Techniques
For the fabrication of thin films, Physical Vapor Deposition (PVD) techniques specified greater contribution than all other deposition techniques. Laser Ablation or Pulsed Laser deposition (PLD) technique is the one of most promising techniques for the fabrication of thin films among all other physical vapor deposition. In particular, flexible thin-film energy storage fabrication PLD plays an important role due to its special parameters such as fine thickness control, partial pressure atmospheric condition, pulsed repetition rate, in-situ annealing and microstructure optimization. Very recently, thin film supercapbatteries have been broadly studied, in which the battery and supercapacitor based electrodes are combined to obtain a high specific power and specific energy density and extended cycle stability. In order to fabricate thin film supercapbatteries, electrodes that have a large potential window, high capacitance, and capacity performance are vastly desired. Thus, the presented chapter represents an important enhancement in the growth of economical and eco-friendly thin flexible supercapbatteries and confirms their potential in sensible applications such as transport electronics devices and other gadgets.
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