红外材料薄壁面超精密磨削技术研究

Y. Jia, Peng Wang, Hao Zhang, Hongshun Zhang, Tianyu Zhao, Bin Xuan
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摘要

在某些光学系统中,对红外材料薄壁面的粗糙度要求很高,需要进行超精密磨削。本文以多晶氟化镁(MgF2)为研究对象,研究了此类零件侧面成形过程中刀具残留痕迹的去除,并分析了两种不同的固定磨料磨削方法对侧面粗糙度的影响。首先采用不同粒度的金刚石砂轮对MgF2侧面进行外围磨削的对比实验,然后采用不同粒度的球团进行末端磨削。结果表明,通过端面磨削可以去除刀具痕迹,表面粗糙度Ra从1.4241μm降低到0.0458μm。
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Research on ultra-precision grinding technology of thin-walled side of infrared materials
In some optical systems, high requirements are put forward for the roughness of the thin-walled side of infrared materials, and ultra-precision grinding is needed. In this paper, the removal of residual tool marks in the side forming process of such parts is studied, and the influence of two different grinding methods of fixed abrasive on the side roughness is analyzed, and polycrystalline magnesium fluoride (MgF2) is taken as the research object. Firstly, the comparative experiment of peripheral grinding on the side of MgF2 is carried out by using diamond grinding wheel with different particle sizes, and then the end grinding is carried out by using different particle sizes of pellets. It is proved that the tool marks can be removed by end face grinding, and the surface roughness Ra decreases from 1.4241μm to 0.0458μm.
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