Taiyu Okatani, A. Nakai, T. Takahata, I. Shimoyama
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A MEMS slip sensor: Estimations of triaxial force and coefficient of static friction for prediction of a slip
We report on a MEMS slip sensor that estimates triaxial force as well as coefficient of static friction for prediction of a slip. The sensor was composed of the outer and inner elastomers separated by a hard substrate, which enable to measure triaxial force independently of coefficient of static friction. We fabricated a prototype of the sensor and evaluated it by pressing and sliding it on various conditions of coefficient of static friction.