{"title":"面向粗线图像的深度神经网络可视化","authors":"N. Chaudhary, S. Savari","doi":"10.1117/12.2535667","DOIUrl":null,"url":null,"abstract":"Low dose scanning electron microscope (SEM) images are an attractive option to estimate the roughness of nanos- tructures. We recently proposed two deep convolutional neural network (CNN) architectures named “LineNet” to simultaneously perform denoising and edge estimation on rough line SEM images. In this paper we consider multiple visualization tools to improve our understanding of LineNet1; one of these techniques is new to the visualization of denoising CNNs. We use the resulting insights from these visualizations to motivate a study of two variations of LineNet1 with fewer neural network layers. Furthermore, although in classification CNNs edge detection is commonly believed to happen early in the network, the visualization techniques suggest that important aspects of edge detection in LineNet1 occur late in the network.","PeriodicalId":287066,"journal":{"name":"European Mask and Lithography Conference","volume":"96 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Towards a visualization of deep neural networks for rough line images\",\"authors\":\"N. Chaudhary, S. Savari\",\"doi\":\"10.1117/12.2535667\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Low dose scanning electron microscope (SEM) images are an attractive option to estimate the roughness of nanos- tructures. We recently proposed two deep convolutional neural network (CNN) architectures named “LineNet” to simultaneously perform denoising and edge estimation on rough line SEM images. In this paper we consider multiple visualization tools to improve our understanding of LineNet1; one of these techniques is new to the visualization of denoising CNNs. We use the resulting insights from these visualizations to motivate a study of two variations of LineNet1 with fewer neural network layers. Furthermore, although in classification CNNs edge detection is commonly believed to happen early in the network, the visualization techniques suggest that important aspects of edge detection in LineNet1 occur late in the network.\",\"PeriodicalId\":287066,\"journal\":{\"name\":\"European Mask and Lithography Conference\",\"volume\":\"96 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"European Mask and Lithography Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2535667\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"European Mask and Lithography Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2535667","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Towards a visualization of deep neural networks for rough line images
Low dose scanning electron microscope (SEM) images are an attractive option to estimate the roughness of nanos- tructures. We recently proposed two deep convolutional neural network (CNN) architectures named “LineNet” to simultaneously perform denoising and edge estimation on rough line SEM images. In this paper we consider multiple visualization tools to improve our understanding of LineNet1; one of these techniques is new to the visualization of denoising CNNs. We use the resulting insights from these visualizations to motivate a study of two variations of LineNet1 with fewer neural network layers. Furthermore, although in classification CNNs edge detection is commonly believed to happen early in the network, the visualization techniques suggest that important aspects of edge detection in LineNet1 occur late in the network.