注入氩气对铂硅化物形成的影响

{"title":"注入氩气对铂硅化物形成的影响","authors":"V. Borisenko, D. I. Zarovskii, V. Tokarev","doi":"10.1002/PSSA.2211070154","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":148242,"journal":{"name":"May 16","volume":"367 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Influence of Argon Implantation on the Formation of Platinum Silicides\",\"authors\":\"V. Borisenko, D. I. Zarovskii, V. Tokarev\",\"doi\":\"10.1002/PSSA.2211070154\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":148242,\"journal\":{\"name\":\"May 16\",\"volume\":\"367 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1988-05-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"May 16\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1002/PSSA.2211070154\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"May 16","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/PSSA.2211070154","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}