分布式开关微波器件协同设计的新方法

R. Allanic, Y. Quéré, D. Le Berre, C. Quendo
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引用次数: 17

摘要

本文讨论了一种在半导体衬底中与分布式PIN开关相关联的微带线协同设计的新方法。为了优化半导体效应和微波传播之间的平衡,选择了高阻硅衬底。事实上,由于这种特殊的衬底,新的协同设计概念由基于N+PP+结的集成和分布式开关来说明。这一概念为可调谐微波器件的设计提供了极大的灵活性。此外,将其应用于平面技术中的可调谐分布式系统(天线,滤波器等),可以避免对报告组件或金属化孔的需要。由于采用了一种新的协同设计流程,因此考虑了半导体和微波器件之间的耦合。制造并测量了两个具有可切换掺杂微带线的演示器来验证该方法。在考虑的整个频段(从直流到20 GHz)内,插入损耗(IL)和隔离(Iso)的性能分别低于2.8 dB和高于40 dB。
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A novel approach to co-design microwave devices with distributed switches
This paper deals with a novel approach to co-design a microstrip line associated with a distributed PIN switch in a semiconductor substrate. An High-Resistivity Silicon (HR-Si) substrate was chosen to optimize the trade-off between semiconductor effects and microwave propagation. Indeed, thanks to this particular substrate, the novel co-design concept is illustrated by an integrated and distributed switch based on an N+PP+ junction. This concept offers great flexibility in the design of tunable microwave devices. Moreover, applied to tunable distributed systems (antennas, filters, etc) in planar technology, it makes it possible to avoid the need for reported components or metalized holes. The coupling between semiconductors and microwave devices is taken into account thanks to a new co-design flow. Two demonstrators, with switchable doped microstrip lines, are manufactured and measured to validate the approach. The performances achieved in terms of insertion losses (IL) and isolation (Iso) were lower than 2.8 dB and higher than 40 dB, respectively, over the whole frequency band under consideration (from DC to 20 GHz).
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