Fabrication of Perovskite/Si periodic microwire arrays via micro-pump fluidic strategy for optelectronics applications

We explore a micro-pump strategy for injecting perovskite materials into Si micro-channels, allowing fabrication of many perovskite micro-wires (MWs) to form inside the regularly-spaced (periodic) Si micro-grooves (~ 1000 MWs/mm). Mask-free laser interference lithography is used to produce periodic Si micro-channels. The SiO2 layer is deposited on the Si array before pumping perovskite to enhance the device performance. We demonstrate a cost-effective zero-waste fabrication method of highly responsive photodetectors based on uniform perovskite MWs/SiO2/Si periodic arrays.