中隙波长为1.55 /spl μ m的三维光子晶体的制备

Conference on Lasers and Electro-Optics, 2003. CLEO '03. Pub Date : 1900-01-01 DOI:10.1109/QELS.2003.238455

M. Qi, S. Johnson, J. Joannopoulos, H. L. Smith

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引用次数: 1

摘要

采用逐层法制备了中隙波长为1.55 /spl mu/m的七功能层三维光子晶体。我们使用电子束光刻来对准和定义图案，反应蚀刻来转移图案，并使用介电自旋来使表面平面化。四个这样的循环就足以完成制造。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication of three-dimensional photonic crystals with midgap wavelength at 1.55 /spl mu/m

Seven-functional-layer 3D photonic crystals with midgap wavelength at 1.55 /spl mu/m were fabricated with a layer-by-layer approach. We employed e-beam lithography to align and define the pattern, reactive-ion-etching to transfer the pattern, and spin-on-dielectrics to planarize the surface. Four such cycles were sufficient to complete the fabrication.

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Conference on Lasers and Electro-Optics, 2003. CLEO '03.

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