硅衬底氮化铝光子学平台

2021 Conference on Lasers and Electro-Optics (CLEO) Pub Date : 2021-05-01 DOI:10.1364/cleo_si.2021.sth2h.3

Nanxi Li, C. Ho, Yanmei Cao, Shiyang Zhu, G. Chen, Yuan Hsing Fu, Yao Zhu, D. Tan, L. Lee

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引用次数: 2

摘要

介绍了微电子研究所研制的cmos兼容AlN光子学平台，并报道了AlN的非线性指标。对所展示的光电器件进行了综述，并展望了未来的发展前景。

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Aluminum Nitride Photonics Platforms on Silicon Substrate

The CMOS-compatible AlN photonics platforms developed within Institute of Microelectronics (IME) are presented, and nonlinear index of the AlN is reported. The photonics devices demonstrated are reviewed, and the future prospective is provided.

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2021 Conference on Lasers and Electro-Optics (CLEO)

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