{"title":"基于差共焦的螺旋扫描中心误差优化","authors":"Jun Huang, Yuguo Cui, Jun Xiang","doi":"10.1109/3M-NANO56083.2022.9941572","DOIUrl":null,"url":null,"abstract":"A spiral scanning center error optimization method based on differential confocal (ODC) is proposed, allowing for high-precision and high-efficiency non-contact measurement of microstructure surface topography. To begin, a probe centering method based on grating rotation successive approximation is designed to reduce the centering error of 3D shape measurement during spiral scanning. The surface morphology of the standard sample was then measured using an experimental platform based on the ODC principle. The center error is within $0.75\\ \\mu\\mathrm{m}$, and the maximum deviation is within 1.4067%, which is consistent with the commercial white light interferometer. This method has a lot of potential for accurate and efficient 3D surface topography measurement.","PeriodicalId":370631,"journal":{"name":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"207 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optimization of Spiral Scanning Center Error Based on Differential Confocal\",\"authors\":\"Jun Huang, Yuguo Cui, Jun Xiang\",\"doi\":\"10.1109/3M-NANO56083.2022.9941572\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A spiral scanning center error optimization method based on differential confocal (ODC) is proposed, allowing for high-precision and high-efficiency non-contact measurement of microstructure surface topography. To begin, a probe centering method based on grating rotation successive approximation is designed to reduce the centering error of 3D shape measurement during spiral scanning. The surface morphology of the standard sample was then measured using an experimental platform based on the ODC principle. The center error is within $0.75\\\\ \\\\mu\\\\mathrm{m}$, and the maximum deviation is within 1.4067%, which is consistent with the commercial white light interferometer. This method has a lot of potential for accurate and efficient 3D surface topography measurement.\",\"PeriodicalId\":370631,\"journal\":{\"name\":\"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"207 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-08-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO56083.2022.9941572\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO56083.2022.9941572","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optimization of Spiral Scanning Center Error Based on Differential Confocal
A spiral scanning center error optimization method based on differential confocal (ODC) is proposed, allowing for high-precision and high-efficiency non-contact measurement of microstructure surface topography. To begin, a probe centering method based on grating rotation successive approximation is designed to reduce the centering error of 3D shape measurement during spiral scanning. The surface morphology of the standard sample was then measured using an experimental platform based on the ODC principle. The center error is within $0.75\ \mu\mathrm{m}$, and the maximum deviation is within 1.4067%, which is consistent with the commercial white light interferometer. This method has a lot of potential for accurate and efficient 3D surface topography measurement.
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