纳米流体泵送的纳米静电膜驱动

2020 Intermountain Engineering, Technology and Computing (IETC) Pub Date : 2020-10-02 DOI:10.1109/IETC47856.2020.9249148

Grant G Stagg, R. Harris, Hollis Belnap, A. Hawkins

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引用次数: 0

摘要

我们描述了一种用于泵送流体通过纳米级通道的装置。该纳米流体泵是由化学气相沉积生长的柔性硅膜制成的，并通过静电力驱动。演示了一种使用干膜创建流体界面的封装技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nanoscale Electrostatic Membrane Actuation for Nanofluidic Pumping

We describe a device intended for pumping fluids through nanoscale channels. The nanofluidic pump is created from flexible silica membranes grown through chemical vapor deposition and actuated through electrostatic force. A packaging technique using dry film to create fluid interfaces is demonstrated.

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2020 Intermountain Engineering, Technology and Computing (IETC)

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