用于213纳米半导体检测的可调谐皮秒深紫外激光系统

Laser Congress 2019 (ASSL, LAC, LS&C) Pub Date : 2019-09-29 DOI:10.1364/ASSL.2019.ATH4A.6

K. Miyata, A. Tanabashi, L. Desbiens, V. Roy, Y. Taillon, M. Mohara, K. Shimura, S. Nakayama, S. Wada

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引用次数: 1

摘要

我们报道了一种高重复率，皮秒光纤主振荡器和功率放大器系统，工作频率为120和240 MHz，脉冲范围为28-87 ps，其五次谐波产生用于213 nm的半导体检测。

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Tunable Picosecond Deep-UV Laser System for Semiconductor Inspection at 213 nm

We report a high-repetition-rate, picosecond fiber master-oscillator and power-amplifier system operating at 120 and 240 MHz in the pulse range of 28-87 ps and its fifth-harmonic generation for semiconductor inspection at 213 nm.

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Laser Congress 2019 (ASSL, LAC, LS&C)

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