硅微气相色谱与丝网加热器和聚酰亚胺毛细管插入

2020 Intermountain Engineering, Technology and Computing (IETC) Pub Date : 2020-10-02 DOI:10.1109/IETC47856.2020.9249209

James Green, Carlos R. Vilorio, Kalliyan Lay, Christine Lastra, A. Hawkins

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引用次数: 2

摘要

我们设计并制造了一种能够进行气相色谱分析的硅微芯片。微芯片具有板载加热器和硅毛细管直接接口，以实现尽可能低的热质量，并能够在超过300°C的温度下工作。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Silicon Micro Gas Chromatography with Silk Screen Heater and Polyimide Capillary Insertion

We have designed and fabricated a silicon microchip capable of gas chromatography. The microchips feature onboard heaters and direct interfacing with silica capillaries for the lowest possible thermal mass and are capable of operating at over 300°C.

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2020 Intermountain Engineering, Technology and Computing (IETC)

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