R. Dylewicz, R. Green, M. Sorel, A. C. Bryce, Richard M. De La Rue
{"title":"InP/InGaAsP脊波导中深蚀刻均匀侧壁光栅的表征","authors":"R. Dylewicz, R. Green, M. Sorel, A. C. Bryce, Richard M. De La Rue","doi":"10.1109/CLEOE-EQEC.2009.5191474","DOIUrl":null,"url":null,"abstract":"We report on the spectral characterization of 1st order sidewall gratings with constant period of Λ = 236 nm, which were deeply etched into InP-based passive ridge waveguides. Periodic structures of this type with variable geometry (adjustable recess depth) may be used as the mirrors with well-controlled reflectivity for laser facets and intracavity reflectors, as well as in optical pulse compressors, when grating period chirp is imposed [1].","PeriodicalId":346720,"journal":{"name":"CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference","volume":"360 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Characterization of deeply etched uniform sidewall gratings in InP/InGaAsP ridge waveguides\",\"authors\":\"R. Dylewicz, R. Green, M. Sorel, A. C. Bryce, Richard M. De La Rue\",\"doi\":\"10.1109/CLEOE-EQEC.2009.5191474\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report on the spectral characterization of 1st order sidewall gratings with constant period of Λ = 236 nm, which were deeply etched into InP-based passive ridge waveguides. Periodic structures of this type with variable geometry (adjustable recess depth) may be used as the mirrors with well-controlled reflectivity for laser facets and intracavity reflectors, as well as in optical pulse compressors, when grating period chirp is imposed [1].\",\"PeriodicalId\":346720,\"journal\":{\"name\":\"CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference\",\"volume\":\"360 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-06-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE-EQEC.2009.5191474\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE-EQEC.2009.5191474","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Characterization of deeply etched uniform sidewall gratings in InP/InGaAsP ridge waveguides
We report on the spectral characterization of 1st order sidewall gratings with constant period of Λ = 236 nm, which were deeply etched into InP-based passive ridge waveguides. Periodic structures of this type with variable geometry (adjustable recess depth) may be used as the mirrors with well-controlled reflectivity for laser facets and intracavity reflectors, as well as in optical pulse compressors, when grating period chirp is imposed [1].