基于高频SU-8的三维毫米波天线传输线

2009 IEEE MTT-S International Microwave Workshop Series on Signal Integrity and High-Speed Interconnects Pub Date : 2009-04-14 DOI:10.1109/IMWS.2009.4814918

Sae-Won Lee, A. Parameswaran, R. Vaughan, A. Mahanfar

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引用次数: 1

摘要

介绍了一种利用聚合物微机电系统(MEMS)工艺制备三维毫米波天线传输线的方法和特性。制造工艺步骤在低温下进行，并且与片上CMOS集成兼容。在晶圆片上镀上金属层，用Au和Cr覆盖结构，并通过锚定设计实现电隔离。

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High Frequency SU-8 Based Transmission Line for 3-D Millimeter-wave Antennas

A fabrication method and characterization of transmission lines for 3-D millimeter-wave antennas are presented using a polymer micro-electro-mechanical-systems (MEMS) fabrication process. The fabrication process steps are performed at low temperatures and are compatible for on-chip CMOS integration. Blanket metal deposition is applied to the wafer to coat the structures with Au and Cr and electrical isolation is achieved by anchor designs.

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2009 IEEE MTT-S International Microwave Workshop Series on Signal Integrity and High-Speed Interconnects

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