用于光纤模块对准的微机械XY平台

OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005. Pub Date : 2005-03-06 DOI:10.1109/OFC.2005.192911

M. Epitaux, J. Verdeil, Y. Petremand, W. Noell, N. D. de Rooij

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引用次数: 13

摘要

提出了一种新型的硅微加工XY平台和混合微透镜，用于光纤模块对准。介绍了一种微机电系统微对准方法和硅芯片设计。最后讨论了微加工器件的性能。

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Micro-machined XY stage for fiber optics module alignment

A novel silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. A MEMS micro-alignment method and silicon chip design are described. Finally the micro-fabricated device performance is discussed.

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OFC/NFOEC Technical Digest. Optical Fiber Communication Conference, 2005.

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