基于多通道衍射光学元件的波前像差传感器阈值灵敏度分析

P. A. Khorin, S. G. Volotovskiy
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引用次数: 4

摘要

本文在Zernike函数的基础上,利用多通道衍射光学元件,研究了一种基于分析场光学展开的波前传感器。衍射阶中心的相关峰对应于分析场中特定像差的检测,峰强度对应于像差的大小。分析了所考虑的波前像差传感器的阈值灵敏度。通过多次数值实验,得到了所考虑传感器灵敏度的阈值。结果表明,在分析波前像差时,当波前偏差超过一定的阈值时,可以检测到虚假像差,而不同类型的像差的阈值是不同的。
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Analysis of the threshold sensitivity of a wavefront aberration sensor based on a multi-channel diffraction optical element
In this paper, we investigate a wavefront sensor based on the optical expansion of the analyzed field in the basis of Zernike functions using a multichannel diffractive optical element. Correlation peaks at the centers of diffraction orders correspond to the detection of specific aberrations in the analyzed field, and the peak intensity corresponds to the magnitude of the aberration. The analysis of the threshold sensitivity of the considered wavefront aberration sensor is carried out. In a number of numerical experiments, the threshold value of the sensitivity of the sensor under consideration was obtained. It turned out that when analyzing wavefront aberrations, spurious aberrations can be detected when the wavefront deviation exceeds a certain threshold value, and this value varies for each type of aberration.
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