单脉冲高分辨率x射线接触显微镜与先进的环氧树脂novolac抗蚀剂

P. Argitis, A. Cefalas, Z. Kollia, E. Sarantopoulou, T. Ford, Tony Stead, A. Marranca, C. Danson, J. Knott, D. Neely
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引用次数: 1

摘要

本文报道了一种环氧新伏拉克化学放大光刻胶,在软x射线的水窗中获得活体生物物种的x射线图像。这种光刻胶的响应至少比接触x射线显微镜中使用的标准PMMA“快”两个数量级。原子力显微镜下的抗阻剂,通过生物标本掩蔽获得的浮雕图像,表明在横向尺寸(细胞鞭毛的大小)和深度剖面上的分辨率优于300nm。
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Single-pulse high-resolution x-ray contact microscopy with an advanced epoxy novolac resist
We report on the use of an epoxy novolac chemically amplified photoresist, to get x-ray images of living biological species in the water window of soft x-rays. This photoresist response was at least two orders of magnitude 'faster' than the standard used PMMA in contact x-ray microscopy. Atomic force microscopy of the resist, relief images obtained with biological specimen masking, suggests a resolution better than 300 nm in lateral dimensions - the size of the cell flagellas - and 20 nm in depth profiles.
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