A CMOS-compatible lamb wave resonator for liquid properties sensing

Lamb wave sensor for liquid properties sensing is superior to other acoustic wave sensors, because of the high sensitivity and low attenuation. Researchers mainly focus on the delay line based Lamb wave sensor. Such kind of Lamb wave sensor suffers from issues of poor quality factor, stability and reproducibility. Lamb wave resonator which provides a compact and rugged solution, however, lacks of study. In this work we develop a Lamb wave resonator and study its liquid sensing performance. A high quality factor of 1909 and linear frequency response to the square root of viscosity-density product of the liquid are achieved.