光学MEMS器件的闭环控制研究

Int. J. Comput. Eng. Sci. Pub Date : 2003-09-01 DOI:10.1142/S1465876303001472

H. Cai, C. W. Chan, K. Ling, C. Lu, Y. X. Wang, A. Liu

{"title":"光学MEMS器件的闭环控制研究","authors":"H. Cai, C. W. Chan, K. Ling, C. Lu, Y. X. Wang, A. Liu","doi":"10.1142/S1465876303001472","DOIUrl":null,"url":null,"abstract":"In this study, a digital control system is developed for the microelectromechanical (MEMS) device - Variable Optical Attenuator (VOA). With the closed-loop control circuit, each VOA module implements the functions of power set point tracking and disturbance rejection. Moreover, this control system, with the device, entrusts the VOA module with leading performance, stability, reliability and fast dynamic response.","PeriodicalId":331001,"journal":{"name":"Int. J. Comput. Eng. Sci.","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Study Of Closed-Loop Control Of Optical MEMS Device\",\"authors\":\"H. Cai, C. W. Chan, K. Ling, C. Lu, Y. X. Wang, A. Liu\",\"doi\":\"10.1142/S1465876303001472\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, a digital control system is developed for the microelectromechanical (MEMS) device - Variable Optical Attenuator (VOA). With the closed-loop control circuit, each VOA module implements the functions of power set point tracking and disturbance rejection. Moreover, this control system, with the device, entrusts the VOA module with leading performance, stability, reliability and fast dynamic response.\",\"PeriodicalId\":331001,\"journal\":{\"name\":\"Int. J. Comput. Eng. Sci.\",\"volume\":\"49 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Int. J. Comput. Eng. Sci.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1142/S1465876303001472\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Int. J. Comput. Eng. Sci.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1142/S1465876303001472","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文针对微机电(MEMS)器件可变光衰减器(VOA)开发了一种数字控制系统。通过闭环控制电路，各VOA模块实现了功率设定点跟踪和抗干扰功能。此外，该控制系统配合该装置，使VOA模块具有领先的性能、稳定、可靠和快速的动态响应。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

A Study Of Closed-Loop Control Of Optical MEMS Device

In this study, a digital control system is developed for the microelectromechanical (MEMS) device - Variable Optical Attenuator (VOA). With the closed-loop control circuit, each VOA module implements the functions of power set point tracking and disturbance rejection. Moreover, this control system, with the device, entrusts the VOA module with leading performance, stability, reliability and fast dynamic response.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Int. J. Comput. Eng. Sci.

自引率

0.00%

发文量