Fabrication of hybrid wireless smart temperature sensor

In this study, we present a hybrid wireless smart temperature sensor using thermoelectric sensor and wireless transmitter. The thermoelectric sensor using SOI structure consists of 17 pairs of n- and p-type single-crystal silicon strips and selective absorption area. The sensitivity of the fabricated thermoelectric sensor was found to be approximately 190µV/°C. The wireless transmitter consists of an amplifier, a modulator and an oscillator. The dual pulse position modulation method uses two narrow pulses for the transmitter, and distance between two narrow pulses describes the amplitude of input signal. Oscillator with oscillation control switch allows operating with low power consumption.