P. Farinelli, F. Solazzi, C. Calaza, B. Margesin, R. Sorrentino
{"title":"基于开关推挽机构的大调谐范围MEMS变容管","authors":"P. Farinelli, F. Solazzi, C. Calaza, B. Margesin, R. Sorrentino","doi":"10.1109/EUMC.2008.4751752","DOIUrl":null,"url":null,"abstract":"This paper presents a novel wide tuning range MEMS varactor based on a toggle push - pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing the MEMS manufacturing complexity. As a proof of concept, a toggle MEMS varactor has been modeled, designed and manufactured in shunt configuration on a 50 Omega coplanar transmission line. Analytical and full wave electromechanical models are provided as well as electromagnetic characterization. The device has been manufactured on HR Silicon substrate by using the standard FBK-irst RF MEMS process. Optical profile, DC and RF measurements are presented in the 0-40 GHz frequency band. Excellent RF performance as well as a capacitance tuning ratio of 2.5 has been obtained.","PeriodicalId":344657,"journal":{"name":"2008 European Microwave Integrated Circuit Conference","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"21","resultStr":"{\"title\":\"A Wide Tuning Range MEMS Varactor Based on a Toggle Push-Pull Mechanism\",\"authors\":\"P. Farinelli, F. Solazzi, C. Calaza, B. Margesin, R. Sorrentino\",\"doi\":\"10.1109/EUMC.2008.4751752\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a novel wide tuning range MEMS varactor based on a toggle push - pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing the MEMS manufacturing complexity. As a proof of concept, a toggle MEMS varactor has been modeled, designed and manufactured in shunt configuration on a 50 Omega coplanar transmission line. Analytical and full wave electromechanical models are provided as well as electromagnetic characterization. The device has been manufactured on HR Silicon substrate by using the standard FBK-irst RF MEMS process. Optical profile, DC and RF measurements are presented in the 0-40 GHz frequency band. Excellent RF performance as well as a capacitance tuning ratio of 2.5 has been obtained.\",\"PeriodicalId\":344657,\"journal\":{\"name\":\"2008 European Microwave Integrated Circuit Conference\",\"volume\":\"18 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"21\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 European Microwave Integrated Circuit Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EUMC.2008.4751752\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 European Microwave Integrated Circuit Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EUMC.2008.4751752","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 21
摘要
本文提出了一种基于开关推拉机构的新型宽调谐范围MEMS变容器，用于高射频功率应用，提高了可靠性。该装置锚定采用扭转弹簧机构，几乎允许全电容调谐范围。主动控制的拉出实现在不增加MEMS制造复杂性的情况下也提供了更好的机械稳定性。作为概念验证，在50 ω共面传输线上进行了并联配置的切换MEMS变容管建模，设计和制造。分析和全波机电模型以及电磁特性提供。该器件采用标准的fbk - first RF MEMS工艺在HR硅衬底上制造。给出了0-40 GHz频段的光学轮廓、直流和射频测量。获得了优异的射频性能和2.5的电容调谐比。
A Wide Tuning Range MEMS Varactor Based on a Toggle Push-Pull Mechanism
This paper presents a novel wide tuning range MEMS varactor based on a toggle push - pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes a torsion spring mechanism which virtually allows for a full capacitance tuning range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that is realized without increasing the MEMS manufacturing complexity. As a proof of concept, a toggle MEMS varactor has been modeled, designed and manufactured in shunt configuration on a 50 Omega coplanar transmission line. Analytical and full wave electromechanical models are provided as well as electromagnetic characterization. The device has been manufactured on HR Silicon substrate by using the standard FBK-irst RF MEMS process. Optical profile, DC and RF measurements are presented in the 0-40 GHz frequency band. Excellent RF performance as well as a capacitance tuning ratio of 2.5 has been obtained.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
