Mingbo He, Ziliang Ruan, Jian Jian, Yuxuan Ren, Mengyue Xu, Liu Liu, Siyuan Yu, Xinlun Cai
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Mach-Zehnder Modulators Based on Hybrid Silicon and Lithium Niobate Platform
We design and demonstrate a silicon and LN hybridly integrated Mach-Zehnder interferometer modulators. The fabricated devices show a half-wave electro-optic modulation efficiency of 2.25V.cm and data rates up to 5Gbps.