采样误差在EUV镜面规格和测试中的作用

Optical Fabrication and Testing Pub Date : 1900-01-01 DOI:10.1364/oft.1996.owf.4

E. Church, P. Takacs

{"title":"采样误差在EUV镜面规格和测试中的作用","authors":"E. Church, P. Takacs","doi":"10.1364/oft.1996.owf.4","DOIUrl":null,"url":null,"abstract":"There are two sides to the bright coin of mirror quality: One is specification -- the determination of acceptable level of errors in the shape and finish of the mirror surface -- and the second is testing -- the procedure for measuring those errors to ensure compliance with the specifications.","PeriodicalId":354934,"journal":{"name":"Optical Fabrication and Testing","volume":"79 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The role of sampling errors in the specification and testing of EUV mirror surfaces\",\"authors\":\"E. Church, P. Takacs\",\"doi\":\"10.1364/oft.1996.owf.4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"There are two sides to the bright coin of mirror quality: One is specification -- the determination of acceptable level of errors in the shape and finish of the mirror surface -- and the second is testing -- the procedure for measuring those errors to ensure compliance with the specifications.\",\"PeriodicalId\":354934,\"journal\":{\"name\":\"Optical Fabrication and Testing\",\"volume\":\"79 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Fabrication and Testing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oft.1996.owf.4\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1996.owf.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

镜面质量有两面:一面是规格——确定镜面形状和光洁度的可接受误差水平;另一面是测试——测量这些误差以确保符合规格的程序。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

The role of sampling errors in the specification and testing of EUV mirror surfaces

There are two sides to the bright coin of mirror quality: One is specification -- the determination of acceptable level of errors in the shape and finish of the mirror surface -- and the second is testing -- the procedure for measuring those errors to ensure compliance with the specifications.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Optical Fabrication and Testing

自引率

0.00%

发文量