基于CCD的工业x射线成像系统

H. Chou, D. Lai, C.I. Hsu
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引用次数: 2

摘要

所提出的x射线成像系统是基于一个典型的工业级电荷耦合器件(CCD),该器件与荧光粉屏耦合并在室温下工作。图像采集和数据分析使用商用8位帧采集器和个人计算机进行。用x射线管对荧光转换器的设置、降噪和响应进行了评估。测量表明,该系统可以实现每毫米16行对的空间分辨率和0.1毫米厚塑料片的对比度。演示表明,该系统可以检测不透明塑料瓶中的液位,机械部件的缺陷,电气部件的接线图,甚至可以检测塑料盖集成电路芯片中的30 pm金线。
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A CCD Based X-ray Imaging System For Industrial Applications
The presented x-ray imaging system is based on a typical industrial grade charge-coupled device (CCD) which is coupled to a phosphor screen and operated at room-temperature. Image acquisition and data analysis is performed using a commercial 8-bit frame grabber and a personal computer. The setup, noise reduction, and the response of fluorescent converters were evaluated with an x-ray tube. Measurements indicate that the system can achieve a spatial resolution of 16 line pairs per mm and a contrast of sensing a piece of 0.1 mm thick plastic sheet. Demonstrations have shown that the system can detect the fluid level in opaque plastic bottles, flaws in mechanical parts, wiring diagram in electrical parts, and to the extreme, 30 pm gold wires in plastic capped integrated circuit chips.
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