凹反射面地形检测采用稳健的非接触技术

J. Arasa, S. Royo, M. Vera
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引用次数: 0

摘要

提出了一种鲁棒的非接触技术,用于对反射凹面进行地形测量,允许测量被测表面的亚微米特征。非接触式光学技术的优点是结合了对环境变化的鲁棒性(无振动隔离支架,对样品定位的公差),这使得它成为一种特别适合包含在自动化工业轮廓中的光学检测技术。结果表明,该技术可应用于任何反射凹面的精密质量控制任务。
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Concave reflective surfaces topographic inspection using robust non-contact techniques
A robust non-contact technique for performing topographic measurements on reflective concave surfaces is presented, allowing the measurement of submicrometric features of the surfaces under test. The advantages of a non-contact optical technique are combined with a robustness to environmental alterations (no vibration isolated mounts, tolerance to the positioning of the sample) which makes it an optical inspection technique specially fit for inclusion in automated industrial outlines. Results are provided for surfaces of polished ophthalmic lenses, showing the ability of the technique to be applied in precision quality control tasks of any reflective concave surface.
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