Dovilė Andrijec, L. Jonušauskas, Agnė Butkutė, Tomas Baravykas, D. Gailevičius, Z. Balevičius, M. Malinauskas
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Manufacturing of Arbitrary Shaped Optical Elements by 3D Laser Lithography
We present 3D laser lithography of arbitrary shaped microoptical elements. Their quality, functionality and resiliency to intense femtosecond laser radiation is investigated quantitatively and qualitatively. Ways to increase throughput while maintaining surface quality are proposed.
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