彩色共焦位移传感器用线扫描色散物镜的设计

Tingting Huang, Jie Yang, Tao Ma
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摘要

讨论了用于线扫描色散共焦位移传感器的定量色散物镜的优化设计方法。提出了一种由近轴面和衍射面组成的多构型光学系统,实现了宽视场下定量逆线性色散距离。利用理想光学模型作为物镜视场,设计了反光路色散透镜。将具有轴向定量色散的多构型隐含在单构型光路中,使成像平面成为评价成像质量的统一参考平面。利用该方法设计了工作波长为580nm ~ 780nm,轴向色散距离为0.37 mm的色散物镜,其线扫描宽度为16 mm,色散线性度优于0.9997。
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Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor
An efficient optimal designing method for a quantitative dispersive objective lens used in line-scanning chromatic confocal displacement sensor was discussed. A multi-configuration optical system consisted of paraxial and diffractive surfaces was proposed to realize the quantitative inverse linear dispersion distance in the wide FOV. The ideal optical model was used as the objective FOV for the design of dispersive lens in the inverse optical path. The multi-configuration with the axial quantitative dispersion was implicit in the single configuration optical path, so that the image plane becomes a unified reference plane for image quality evaluation. With this method, a dispersive objective lens of 580nm-780nm working wavelength band and 0.37 mm axial dispersion distance was designed, which the line-scanning width is 16 mm and the dispersive linearity is better than 0.9997.
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