单晶压电:换能器的革命性发展

C. Oakley, M. Zipparo
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引用次数: 49

摘要

铅基单晶弛豫铁电体具有基本的性能,理论上可以显著提高超声换能器的带宽和灵敏度-带宽乘积。利用单晶谐振器测量的特性,对分数带宽超过120%的高灵敏度阵列元件进行了建模。单元件换能器和阵列的性能明显优于PZT陶瓷阵列。并非所有的性能都优于PZT。晶体通常具有较低的矫顽力场,可以在较低的温度下去极性。此外,有效地使用这些材料也面临着重大挑战。这些包括:学习重复生长具有均匀特性的大晶体,降低晶体成本,改善与单晶的附着力,以及开发阵列工艺,以创建所需的小型谐振器而不损坏它们。本文回顾了单晶的独特特性,并报道了除了成本效益外,高质量晶体生长的所有障碍都已得到有效解决。我们认为单晶将取代陶瓷用于高性能阵列应用。关键问题是:何时、以何种开发成本、以何种阵列成本以及以何种阵列性能水平进行开发。
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Single crystal piezoelectrics: a revolutionary development for transducers
Lead-based single crystal relaxor ferroelectrics have been developed with fundamental properties that in theory should dramatically enhance the bandwidth and sensitivity-bandwidth product for ultrasound transducers. High sensitivity array elements with fractional bandwidths of over 120% have been modeled using the properties measured for single crystal resonators. Single element transducers and arrays have been built with performance that is significantly better than that for arrays built with PZT ceramic. Not all of the properties are better than PZT. The crystals usually have a low coercive field and can be depoled at relatively low temperatures. Also, there are significant challenges to using the materials effectively. These include: learning to repeatably grow large crystals with uniform properties, reducing crystal cost, improving adhesion to single crystals, and developing array processes that create the small resonators required without damaging them. This paper reviews the unique features of single crystals and reports that all of the obstacles except for cost effective growth of high quality crystals have been effectively addressed. We argue that single crystals will displace ceramics for high performance array applications. The critical questions are: when, at what development cost, to what array cost, and to what level of array performance.
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