新型浮动电极单向SAW传感器的研究

D. P. Morgan
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引用次数: 8

摘要

对于低损耗SAW器件的应用,已经开发了各种单相单向换能器(SPUDT)。特别是,DART使用不同宽度的电极,在实际设备中得到了很好的应用。另外,由Yamanouchi于1984年推出的FEUDT采用浮动电极来引入指向性。本文研究了电极具有定宽定节的FEUDT。在这些情况下,换能器反射系数是由电效应决定的,因此,与DART相比,FEUDT对薄膜厚度的影响要小得多。此外,与DART不同的是,FEUDT在铌酸锂等强压电衬底上有效。最近报道了一项关于封建封建制度的新分析。这是一种使用准静态近似的简化方法,它是适用的,因为如果所有电极都短路,反射可以忽略不计。FEUDT之所以符合这个条件,是因为它们每个波长有两个以上的电极。本文使用相同的分析方法对FEUDT进行了进一步的研究,并描述了各种新颖的每个波长有4、5和6个电极的FEUDT。给出了每个周期的转导、反射和电容参数,以及计算指向性所需的反射和转导之间的相对相位。在许多情况下,反射中心和转导中心很容易从几何角度来确定。综述了新型FEUDT的相对性能。
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Investigation of novel floating-electrode unidirectional SAW transducers (FEUDT's)
For low-loss SAW device applications, a variety of single-phase unidirectional transducers (SPUDT's) have been developed. In particular, the DART, using electrodes of different widths, is well established in practical devices. Alternatively, the FEUDT, introduced by Yamanouchi in 1984, employs floating electrodes to introduce directivity. This paper is concerned with FEUDT's in which the electrodes have constant width and pitch. For these cases the transducer reflection coefficient is governed by electrical effects, and consequently the FEUDT is much less critical of film thickness than the DART. Also, unlike the DART, the FEUDT's are effective on strongly-piezoelectric substrates such as lithium niobate. Recently a new analysis of FEUDT's was reported. This is a simplified method using the quasi-static approximation, which is applicable because reflections would be negligible if all the electrodes were shorted. The FEUDT's obey this condition because they have more than two electrodes per wavelength. In this paper, further investigation of FEUDT's is reported using the same analysis, and a variety of novel FEUDT's with 4,5 and 6 electrodes per wavelength are described. Data are given for the transduction, reflection and capacitance parameters per period, and the relative phases between reflection and transduction which is needed to calculate directivity. In many cases the reflection and transduction centres are easily identified from geometrical considerations. The relative performance of the new FEUDT's is reviewed.
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