{"title":"参数对三束激光干涉的影响","authors":"M. Yu, C. Tan, Zuobin Wang, Le Zhao, Wenjun Li","doi":"10.1109/3M-NANO.2013.6737381","DOIUrl":null,"url":null,"abstract":"Three-beam laser interference is used to create spot or grating patterns by three laser beams. In this paper, effect of parameters on three-beam laser interference is discussed. Computer simulation results have shown that the parameters and their deviations of incident angles, azimuthal angles and polarization states will affect the period, contrast, shape and direction of the spots of three-beam interference patterns. The patterns can be useful for the structuring of different surface patterns in three-beam laser interference lithography.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Effect of parameters on three-beam laser interference\",\"authors\":\"M. Yu, C. Tan, Zuobin Wang, Le Zhao, Wenjun Li\",\"doi\":\"10.1109/3M-NANO.2013.6737381\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Three-beam laser interference is used to create spot or grating patterns by three laser beams. In this paper, effect of parameters on three-beam laser interference is discussed. Computer simulation results have shown that the parameters and their deviations of incident angles, azimuthal angles and polarization states will affect the period, contrast, shape and direction of the spots of three-beam interference patterns. The patterns can be useful for the structuring of different surface patterns in three-beam laser interference lithography.\",\"PeriodicalId\":120368,\"journal\":{\"name\":\"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2013.6737381\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2013.6737381","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of parameters on three-beam laser interference
Three-beam laser interference is used to create spot or grating patterns by three laser beams. In this paper, effect of parameters on three-beam laser interference is discussed. Computer simulation results have shown that the parameters and their deviations of incident angles, azimuthal angles and polarization states will affect the period, contrast, shape and direction of the spots of three-beam interference patterns. The patterns can be useful for the structuring of different surface patterns in three-beam laser interference lithography.
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