低温沉积铝掺杂氧化锌(AZO)透明电极的环境稳定性评价

S. Elhamali, M. N. Akhil, K. Abusabee, N. Kalfagiannis, D. Koutsogeorgis
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摘要

环境条件下透明电极电导率的退化被认为是影响太阳能电池长期效率的主要失效模式。本文对AZO薄膜进行了国际电工委员会(IEC) 61646测试,以检验其环境稳定性和作为太阳能电池前电极的适用性。为了探索AZO沉积参数与环境稳定性之间的相互作用,采用射频磁控溅射法在不同参数下沉积AZO薄膜。通过研究不同沉积条件下AZO的电学特征、结构特征和形态特征,考察了测试过程中电导率稳定性的演变。样品的电导率降解率与样品的结构和形态特征(包括晶粒尺寸、晶界密度、表面粗糙度和致密性)直接相关。由于电子密度和迁移率的降低,样品的电阻率在测试期间呈线性增加。对于较厚的AZO样品(360 nm),由于晶粒尺寸、表面轮廓和致密性的增强,稳定性得到了改善。这些样品在测试后保持了太阳能电池的适用薄片电阻21.24 Ω/sq (ρ=7.64×10-4 Ω.cm)。老化研究表明,通过优化沉积参数来控制AZO薄膜的生长过程是提高低温沉积电极环境稳定性的有效途径
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Environmental Stability Evaluation of Aluminium Doped Zinc Oxide (AZO) Transparent Electrodes Deposited at Low Temperature for Solar cells
The degradation of transparent electrodes’ electrical conductivity under environmental conditions is considered as a major failure mode for solar cells’ long-term efficiency. In this paper, AZO thin films were subjected to the International Electrotechnical Commission (IEC) 61646 test to examine their environmental stability and suitability as front electrodes for solar cells. To explore the interplay between AZO deposition parameters and environmental stability, AZO films were deposited by radio frequency magnetron sputtering at different parameters and without external heating. The conductivity stability evolution upon the testwas investigated via studying the AZO electrical, structural, and morphological characteristics at different deposition conditions. A direct dependence was identified between the samples’ conductivity degradation rates and the samples’ structural and morphological characteristics including grain size, grain boundary density, surface roughness, and compactness. The samples’ resistivity increases linearly over the test period due to both electron density and mobility degradations. Improved stability was observed for thicker AZO samples (360 nm) originating from enhanced grain size, surface profile, and compactness. These samplesmaintained solar cells' applicable sheet resistance of 21.24 Ω/sq (ρ=7.64×10-4 Ω.cm) following the test. The conducted aging studies demonstrated that manipulating the AZO films growth process via optimizing the deposition parameters is an effective pathway for low-temperature deposited electrodes with enhanced environmental stability
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