Development of Manufacturing Processes for Vertical Micro-Thermoelectric Generators based on Printed Circuit Boards

This paper discusses and demonstrates the development of fabrication processes for micro-thermoelectric generators based on low-cost fabrication technologies which are suitable for mass production. Simulation studies have been carried out, two fabrication methods are explained and device performance is compared with simulation results. The PCB is used as the main substrate for this device and Bi0.5Sb1.5Te3 (p-type) and Bi2Te2.7Se0.3 (n-type) pastes are used as thermoelectric materials. A square μTEG (15 mm × 15 mm × 500 μm) with 8 thermocouples (TC) is fabricated. A comparison of measurements from an 8-TC-μTEG with simulation results is in good agreement.