{"title":"一种用于太赫兹应用的微型三维螺旋电感的新设计","authors":"Yingying Fan, Zhongyu Li, Xiaoyu Wang, Xusheng Tang","doi":"10.1109/ICAM.2016.7813582","DOIUrl":null,"url":null,"abstract":"This paper proposes the design and analysis of a novel micro-scale three dimensional (3D) helix inductor based on focused ion beam (FIB) technology, which is used for terahertz applications. The structure of the inductor includes two parts: the metallic helix and the coplanar waveguide (CPW). It has extremely small scale and can be integrated with other parts of on-chip circuits easily. In addition, fabricating such 3D helix inductors with high precision is much more convenient than other traditional planar spiral inductors. Good performance of quality factor and inductance value have been observed from the simulation results using High Frequency Structure Simulator (HFSS).","PeriodicalId":179100,"journal":{"name":"2016 International Conference on Integrated Circuits and Microsystems (ICICM)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel design of micro-scale 3D helix inductor for terahertz applications\",\"authors\":\"Yingying Fan, Zhongyu Li, Xiaoyu Wang, Xusheng Tang\",\"doi\":\"10.1109/ICAM.2016.7813582\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper proposes the design and analysis of a novel micro-scale three dimensional (3D) helix inductor based on focused ion beam (FIB) technology, which is used for terahertz applications. The structure of the inductor includes two parts: the metallic helix and the coplanar waveguide (CPW). It has extremely small scale and can be integrated with other parts of on-chip circuits easily. In addition, fabricating such 3D helix inductors with high precision is much more convenient than other traditional planar spiral inductors. Good performance of quality factor and inductance value have been observed from the simulation results using High Frequency Structure Simulator (HFSS).\",\"PeriodicalId\":179100,\"journal\":{\"name\":\"2016 International Conference on Integrated Circuits and Microsystems (ICICM)\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 International Conference on Integrated Circuits and Microsystems (ICICM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICAM.2016.7813582\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Integrated Circuits and Microsystems (ICICM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICAM.2016.7813582","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A novel design of micro-scale 3D helix inductor for terahertz applications
This paper proposes the design and analysis of a novel micro-scale three dimensional (3D) helix inductor based on focused ion beam (FIB) technology, which is used for terahertz applications. The structure of the inductor includes two parts: the metallic helix and the coplanar waveguide (CPW). It has extremely small scale and can be integrated with other parts of on-chip circuits easily. In addition, fabricating such 3D helix inductors with high precision is much more convenient than other traditional planar spiral inductors. Good performance of quality factor and inductance value have been observed from the simulation results using High Frequency Structure Simulator (HFSS).
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