Siti Alifah, Saktioto Saktioto
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摘要

等离子体的密度和反应速率值是产生等离子体氢所需的物理量。两者都需要用于估算等离子体发生器的热量和运行时间。利用连续性方程和Arrhenius方程进行计算,得到了等离子体的密度和反应速率。本研究使用了五种氢,即电子、H2、H2+、H和H+。所用的压力为9.7 mTorr,所用电子的温度高于氢的温度。电子的温度标度为34812开尔文,其他物质的温度标度为9283.2开尔文。研究结果表明,氢气在达到3.8x10-7秒的时间跨度时可以成为等离子体。平衡状态持续10-3秒,时间限制后以等离子体气体返回。各物种在1016 ~ 1018 m-3范围内的密度结果。最快反应速率的值为7,3 × 1053 m- 3s -1。
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KEBERGANTUNGAN TEMPERATUR PLASMA HIDROGEN DALAM TEKANAN RENDAH
The density and reaction rate values of plasma are physical quantities needed to produce plasma hydrogen. Both are needed to estimate the heat and the operating time of plasma generator. Density and reaction rate of plasma values are obtained by computational modeling using the continuity and Arrhenius equation. Five spesies of hydrogen are used in this research i.e electron, H2, H2+, H and H+. The pressure used was 9.7 mTorr and the temperature of electron used is higher than the temperatures of the hydrogen species. The temperatures scale used in high at 34812 Kelvin for electron and 9283.2 for other species. The study resulted that hydrogen gas can be plasma when it reaches the time span 3.8x10-7second. The equilibrium conditions last for 10-3 second after the time limit be returned as plasma gas. The result of density for each species at range 1016 until 1018 m-3. The value of the fastest reaction rate equal to 7,3 x 1053 m-3 s-1. 
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