MWIR InAsSb势垒探测器数据及分析

A. D'Souza, E. Robinson, A. Ionescu, D. Okerlund, T. De Lyon, R. Rajavel, H. Sharifi, N. Dhar, P. Wijewarnasuriya, C. Grein
{"title":"MWIR InAsSb势垒探测器数据及分析","authors":"A. D'Souza, E. Robinson, A. Ionescu, D. Okerlund, T. De Lyon, R. Rajavel, H. Sharifi, N. Dhar, P. Wijewarnasuriya, C. Grein","doi":"10.1117/12.2018427","DOIUrl":null,"url":null,"abstract":"Mid-wavelength infrared (MWIR) InAsSb alloy barrier detectors grown on GaAs substrates were characterized as a function of temperature to evaluate their performance. Detector arrays were fabricated in a 1024 × 1024 format on an 18 μm pitch. A fanout was utilized to directly acquire data from a set of selected detectors without an intervening read out integrating circuit (ROIC). The detectors have a cutoff wavelength equal to ~ 4.9 μm at 150 K. The peak internal quantum efficiency (QE) required a reverse bias voltage of 1 V. The detectors were diffusion-limited at the bias required to attain peak QE. Multiple 18 μm × 18 μm detectors were tied together in parallel by connecting the indium bump of each detector to a single large metal pad on the fanout. The dark current density at -1 V bias for a set of 64 × 64 and 6 × 6 array of detectors, each of which were tied together in parallel was ~ 10-3 A/cm2 at 200 K and 5 × 10-6 A/cm2 at 150 K. The 4096 (64 × 64) and 36 (6 × 6) detectors, both have similar Jdark vs Vd characteristics, demonstrating high operability and uniformity of the detectors in the array. The external QE measured using a narrow band filter centered at ~ 4 μm had values in the 65 – 70 % range. Since the detectors were illuminated through a GaAs substrate which has a reflectance of 29%, the internal QE is greater than 90 %. A 1024 × 1024 ROIC on an 18 μm pitch was also designed and fabricated to interface with the barrier detectors. QE at 150 K for a 1024 × 1024 detector array hybridized to a ROIC matched the QE measured on detectors that were measured directly through a fanout chip. Median D* at 150 K under a flux of 1.07 × 1015 ph/(cm2/s was 1.0 x 1011 cm Hz1/2 /W.","PeriodicalId":338283,"journal":{"name":"Defense, Security, and Sensing","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"MWIR InAsSb barrier detector data and analysis\",\"authors\":\"A. D'Souza, E. Robinson, A. Ionescu, D. Okerlund, T. De Lyon, R. Rajavel, H. Sharifi, N. Dhar, P. Wijewarnasuriya, C. Grein\",\"doi\":\"10.1117/12.2018427\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Mid-wavelength infrared (MWIR) InAsSb alloy barrier detectors grown on GaAs substrates were characterized as a function of temperature to evaluate their performance. Detector arrays were fabricated in a 1024 × 1024 format on an 18 μm pitch. A fanout was utilized to directly acquire data from a set of selected detectors without an intervening read out integrating circuit (ROIC). The detectors have a cutoff wavelength equal to ~ 4.9 μm at 150 K. The peak internal quantum efficiency (QE) required a reverse bias voltage of 1 V. The detectors were diffusion-limited at the bias required to attain peak QE. Multiple 18 μm × 18 μm detectors were tied together in parallel by connecting the indium bump of each detector to a single large metal pad on the fanout. The dark current density at -1 V bias for a set of 64 × 64 and 6 × 6 array of detectors, each of which were tied together in parallel was ~ 10-3 A/cm2 at 200 K and 5 × 10-6 A/cm2 at 150 K. The 4096 (64 × 64) and 36 (6 × 6) detectors, both have similar Jdark vs Vd characteristics, demonstrating high operability and uniformity of the detectors in the array. The external QE measured using a narrow band filter centered at ~ 4 μm had values in the 65 – 70 % range. Since the detectors were illuminated through a GaAs substrate which has a reflectance of 29%, the internal QE is greater than 90 %. A 1024 × 1024 ROIC on an 18 μm pitch was also designed and fabricated to interface with the barrier detectors. QE at 150 K for a 1024 × 1024 detector array hybridized to a ROIC matched the QE measured on detectors that were measured directly through a fanout chip. Median D* at 150 K under a flux of 1.07 × 1015 ph/(cm2/s was 1.0 x 1011 cm Hz1/2 /W.\",\"PeriodicalId\":338283,\"journal\":{\"name\":\"Defense, Security, and Sensing\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Defense, Security, and Sensing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2018427\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Defense, Security, and Sensing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2018427","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12

摘要

在GaAs衬底上生长的中波长红外(MWIR) InAsSb合金势垒探测器被表征为温度函数,以评价其性能。探测器阵列尺寸为1024 × 1024,直径为18 μm。利用扇出直接从一组选定的检测器获取数据,而不需要中间的读出集成电路(ROIC)。在150 K时,探测器的截止波长为~ 4.9 μm。峰值内部量子效率(QE)需要1 V的反向偏置电压。检测器在达到峰值QE所需的偏置处受到扩散限制。通过将多个18 μm × 18 μm探测器的铟凸块连接到风扇上的单个大型金属垫片上,将多个18 μm × 18 μm探测器并联在一起。并联在一起的64 × 64和6 × 6阵列探测器在-1 V偏置时的暗电流密度在200 K时为~ 10-3 a /cm2,在150 K时为5 × 10-6 a /cm2。4096 (64 × 64)和36 (6 × 6)探测器都具有相似的Jdark vs Vd特性,在阵列中显示了探测器的高操作性和均匀性。使用中心为~ 4 μm的窄带滤波器测量的外部QE值在65 - 70%范围内。由于探测器通过反射率为29%的GaAs衬底照射,因此内部QE大于90%。设计并制作了一个直径为18 μm的1024 × 1024 ROIC与势垒探测器相连接。混合到ROIC的1024 × 1024检测器阵列在150k下的QE与直接通过扇出芯片测量的检测器上测量的QE相匹配。在1.07 × 1015 ph/(cm2/s)通量下,150 K时的中位D*为1.0 × 1011 cm Hz1/2 /W。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
MWIR InAsSb barrier detector data and analysis
Mid-wavelength infrared (MWIR) InAsSb alloy barrier detectors grown on GaAs substrates were characterized as a function of temperature to evaluate their performance. Detector arrays were fabricated in a 1024 × 1024 format on an 18 μm pitch. A fanout was utilized to directly acquire data from a set of selected detectors without an intervening read out integrating circuit (ROIC). The detectors have a cutoff wavelength equal to ~ 4.9 μm at 150 K. The peak internal quantum efficiency (QE) required a reverse bias voltage of 1 V. The detectors were diffusion-limited at the bias required to attain peak QE. Multiple 18 μm × 18 μm detectors were tied together in parallel by connecting the indium bump of each detector to a single large metal pad on the fanout. The dark current density at -1 V bias for a set of 64 × 64 and 6 × 6 array of detectors, each of which were tied together in parallel was ~ 10-3 A/cm2 at 200 K and 5 × 10-6 A/cm2 at 150 K. The 4096 (64 × 64) and 36 (6 × 6) detectors, both have similar Jdark vs Vd characteristics, demonstrating high operability and uniformity of the detectors in the array. The external QE measured using a narrow band filter centered at ~ 4 μm had values in the 65 – 70 % range. Since the detectors were illuminated through a GaAs substrate which has a reflectance of 29%, the internal QE is greater than 90 %. A 1024 × 1024 ROIC on an 18 μm pitch was also designed and fabricated to interface with the barrier detectors. QE at 150 K for a 1024 × 1024 detector array hybridized to a ROIC matched the QE measured on detectors that were measured directly through a fanout chip. Median D* at 150 K under a flux of 1.07 × 1015 ph/(cm2/s was 1.0 x 1011 cm Hz1/2 /W.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Analytic determination of optimal projector lens design requirements for pixilated projectors used to test pixilated imaging sensors A two-color 1024x1024 dynamic infrared scene projection system High-dynamic range DMD-based infrared scene projector The design of flight motion simulators: high accuracy versus high dynamics Dynamic thermal signature prediction for real-time scene generation
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1