{"title":"基于埋场辅助离子交换法的光耦合器制备","authors":"H.R. Azarinia","doi":"10.1109/ISIE.1999.797013","DOIUrl":null,"url":null,"abstract":"A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.","PeriodicalId":227402,"journal":{"name":"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Optical coupler fabrication on based buried field-assisted ion-exchange method\",\"authors\":\"H.R. Azarinia\",\"doi\":\"10.1109/ISIE.1999.797013\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.\",\"PeriodicalId\":227402,\"journal\":{\"name\":\"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)\",\"volume\":\"42 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-07-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISIE.1999.797013\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISIE '99. Proceedings of the IEEE International Symposium on Industrial Electronics (Cat. No.99TH8465)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.1999.797013","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical coupler fabrication on based buried field-assisted ion-exchange method
A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication.
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