用于微电子应用的聚合物中准分子激光诱导的永久导电位点

H. Roth, Constantine Skordoulis, M. Schroedner, I. Stohn, A. Bolovinos, E. Bakalis
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引用次数: 1

摘要

研究表明,激光照射特殊合成的聚(双烷基硫-乙炔)- PATAC聚合物可诱导材料中产生高永久导电位点,而在未暴露区域仍保持绝缘体状态。已观察到电导率变化了16个数量级。最终反应产物的电导率值处于重掺杂半导体的水平。这些电导率值使PATAC涂层材料适用于微电子应用,例如导电路径和电路结构的激光直接成像。
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Excimer-laser-induced permanent electrically conducting sites in polymers for microelectronic applications
It has been demonstrated that the laser irradiation of the specially synthesized polymer Poly(bis-alkylthio-acetylene)- PATAC induces the generation of highly permanently conducting sites in the material which remains an insulator in the unexposed areas. Conductivity changes by 16 orders of magnitude have been observed. The conductivity values of the final reaction products are in the level of a heavily doped semiconductor. These conductivity values make the PATAC coated materials suitable for microelectronic applications such as the laser direct imaging of conducting paths and circuit structures.
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