超精密光学平面元件制造技术

M. Yin
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摘要

本文介绍了利用自制的专用抛光模具材料G-90对光学平面元件进行超精密光学抛光的方法。还详细讨论了抛光条件、抛光工艺特点和抛光模具材料的理化性质对光学条纹稳定性和抛光效率的影响。
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Techniques for Manufacturing Ultraprecision Optical Plane Elements
This article introduced an ultraprecision optical polishing method for optical plane elements using a special polishing mould material G-90 we made. We also discussed in detail that the polishing condition, polishing techniques characters, and physicochemical charaters of the polishing mould material how to influence the stability of optical fringes and polishing efficiency.
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