双向MEMS冲击加速度开关

Shuangjie Liu, Y. Hao, Han Xie
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引用次数: 3

摘要

本文综述了一种新型双向冲击加速度开关的研究进展。为了感知两个方向的冲击加速度变化,设计了一种具有两个敏感方向的MEMS冲击加速度开关。在本设计中,使用四个蛇形弹簧来固定和悬浮可移动电极(传感质量)。通过理论分析和有限元分析对传感质量的运动进行了研究。为了考察蛇形弹簧的强度是否足够,设计了y方向1500g阈值加速度和x方向800g阈值加速度的切换,分别用Covent和Ware进行了仿真。仿真结果表明,阈值加速度基本满足预期。为了保证非故意振动输入不会将传感器质量驱动到固定电极上,分析了开关的模态,计算得到了开关的固有频率和相应的模态振型。
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Two-Direction MEMS Impact Acceleration Switch
This article summarizes research on a novel, two-direction impact acceleration switch. To sense the change of two direction impact acceleration, A MEMS impact acceleration switch with two sensitive directions was designed. In this design, four serpentine springs were used to fix and suspend the movable electrode (sensing mass). The motion of the sensing mass was investigated by theoretical analysis and finite element analysis (FEA). To investigate whether the serpentine springs’ intensity was enough, the switch of the 1500g threshold acceleration in y direction and the 800g threshold acceleration in x direction was designed, simulated with Covent or Ware respectively. The simulation showed that the threshold accelerations basically fulfill the expectancy. To ensure the unintentional vibration inputs would not drive the sensor mass to the fixed electrode, the mode of the switch was analyzed and its natural frequency and the corresponding mode shapes were obtained from the calculation.
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