{"title":"用于表面阻抗测量和水分监测的MOS芯片","authors":"S. Garverick, S. Senturia","doi":"10.1109/IEDM.1980.189928","DOIUrl":null,"url":null,"abstract":"Surface impedance measurements are employed in a variety of applications such as moisture sensing (1), (2). Sheet resistances as high as 1016Ohms/sq are often encountered (3), and reliable measurements are difficult to obtain. This paper reports a planar MOS device and associated measurement technique that can be used to make AC sheet resistance measurements in the frequency range 1 Hz - 10 kHz, and which yields reproducible measurements for sheet resistances as high as 1016Ohms/sq.","PeriodicalId":180541,"journal":{"name":"1980 International Electron Devices Meeting","volume":"207 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"An MOS chip for surface impedance measurement and moisture monitoring\",\"authors\":\"S. Garverick, S. Senturia\",\"doi\":\"10.1109/IEDM.1980.189928\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Surface impedance measurements are employed in a variety of applications such as moisture sensing (1), (2). Sheet resistances as high as 1016Ohms/sq are often encountered (3), and reliable measurements are difficult to obtain. This paper reports a planar MOS device and associated measurement technique that can be used to make AC sheet resistance measurements in the frequency range 1 Hz - 10 kHz, and which yields reproducible measurements for sheet resistances as high as 1016Ohms/sq.\",\"PeriodicalId\":180541,\"journal\":{\"name\":\"1980 International Electron Devices Meeting\",\"volume\":\"207 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1980 International Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1980.189928\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1980 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1980.189928","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An MOS chip for surface impedance measurement and moisture monitoring
Surface impedance measurements are employed in a variety of applications such as moisture sensing (1), (2). Sheet resistances as high as 1016Ohms/sq are often encountered (3), and reliable measurements are difficult to obtain. This paper reports a planar MOS device and associated measurement technique that can be used to make AC sheet resistance measurements in the frequency range 1 Hz - 10 kHz, and which yields reproducible measurements for sheet resistances as high as 1016Ohms/sq.
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