TbFeCo薄膜的结晶研究

Hui Qin, M. Li
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引用次数: 0

摘要

用透射电镜研究了非晶TbFeCo磁光薄膜的激光诱导结晶和退火诱导结晶。采用FTMS系统制备薄膜。研究发现,当强激光照射介质时,会发生结晶。其大小与辐照功率和照射时间有关。这个区域呈圆形。电子衍射图表明,在非晶区和结晶区之间有明显的边界。另一方面,退火时结晶开始于300℃。在400℃退火时,薄膜的HREM显示出在不同区域同时发生结晶。非晶区和结晶区之间没有明显的界限。薄膜的晶格图像表明,薄膜中没有任何成分调制。
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Study on crystallization of TbFeCo films
The laser-induced crystallization and annealing-induced crystallization of amorphous TbFeCo magneto-optical films have been investigated by TEM. The film was prepared by FTMS system. It was found that the crystallization occurred when a powerful laser irradiated the medium. The size was related to the irradiating power and time. The area took the shape of circularity. The electron diffraction pattern showed that there was a clear boundary between the amorphous and the crystallized regions. On the other hand, under annealing the crystallization started at 300 degree(s)C. The HREM of the film annealed at 400 degree(s)C showed the crystallization occurred at different areas simultaneously. There was no clear boundary between the amorphous and the crystallized areas. The lattice image of the film indicated that there was not any compositional modulation in the film.
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