干涉仪透射球的标定

Robert E. Parks, C. Evans, Lianzhen Shao
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引用次数: 18

摘要

由于光学图形的公差越来越严格,并且需要提供可追溯的测试方法以满足ISO 9000标准,因此更需要一种鲁棒可靠的方法来确定干涉仪测试光学中的残余误差。本文介绍了一种廉价、快速、自洽的球面传输光学器件标定方法,该方法在传输光学器件外存在发散测试光束的真实焦点。该方法在某种意义上是自洽的,任何给定的测试结果提供了计算结果方差的方法,并且不需要额外的光学必须校准或跟踪到另一个标准。
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Calibration of Interferometer Transmission Spheres
As the tolerances on optical figure get tighter and as the need to provide traceable test methods to fulfill ISO 9000 standards becomes greater, the more there is the need for a robust and reliable method to determine the residual error in interferometer test optics. This paper describes an inexpensive, quick and self-consistent method of calibrating spherical transmission optics where there is a real focus of the diverging test beam outside the transmission optic. The method is self-consistent in the sense that any given test result provides a means of calculating the variance of the result and requires no additional optic that must be calibrated or traced to another standard.
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