使用“纳米颗粒-光刻胶”复合材料的功能微器件

Int. J. Comput. Eng. Sci. Pub Date : 2003-09-01 DOI:10.1142/S1465876303001678

G. Wiche, J. Goettert, Yujun Song, J. Hormes, C. Kumar

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引用次数: 4

摘要

我们已经开发了两种使用SU-8/纳米颗粒复合材料的功能微器件的制造路线。在第一种方法中，0.5%纳米粒子/SU-8复合材料的图图化导致磁性和发光聚合物微结构。在第二种方法中，将42%的纳米颗粒/SU-8复合材料进行图图化，然后烧结以获得高纵横比高达16的独立陶瓷微结构。

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Functional Micro Devices Using 'Nanoparticle-Photoresist' Composites

We have developed two fabrication routes for functional micro devices using SU-8/nanoparticle composites. In the first route, patterning of a 0.5% nanoparticle/SU-8 composite resulted in magnetic and luminescent polymeric microstructures. In the second route, a 42% nanoparticle/SU-8 composite was patterned followed by sintering to obtain free standing ceramic microstructures with aspect ratios as high as 16.

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Int. J. Comput. Eng. Sci.

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